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Patent Searching and Data


Title:
QUARTZ GLASS FORK
Document Type and Number:
Japanese Patent JPS6482647
Kind Code:
A
Abstract:

PURPOSE: To cope with various types of moving device which prevent its end from deflecting by engaging members to be secured over both sidewalls of a body formed in a rectangular trough shape.

CONSTITUTION: This quartz glass form 10 is formed of a quartz glass body 11 formed in a rectangular trough shape and cut out in parallel with a bottom wall 11b at both sidewalls 11a of the ends near the bottom wall 11b, and a quartz glass member 12 to be secured, formed in a semicylindrical shape and engaged over both sidewalls 11a. According to the configuration, since the deflection of the bottom wall is suppressed by both sidewalls, it can prevent the end from deflecting. Further, it can be easily coped with various types of placing devices merely by altering the member. Moreover, if the body is worn, the member can be repeatedly used only by replacing the body.


Inventors:
MATSUDA MAKOTO
ASANO YASUO
Application Number:
JP24148187A
Publication Date:
March 28, 1989
Filing Date:
September 25, 1987
Export Citation:
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Assignee:
TOSHIBA CERAMICS CO
International Classes:
H01L21/677; H01L21/22; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Yujiro Taka