Title:
RECOVERY METHOD OF In-Ga-Zn OXIDE FROM IGZO SINTERED COMPACT
Document Type and Number:
Japanese Patent JP2014185063
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique to recover a composite oxide of In, Ga, and Zn, which is a raw material of a sputtering target of an IGZO sintered compact, from scrap of the sputtering target with a simple method, and thereby to provide a technique to effectively reuse a rare metal resource.SOLUTION: In a recovery method of a composite oxide of In, Ga, and Zn, a sintered compact of an oxide containing indium (In), gallium (Ga), and zinc (Zn) is leached with an acid, subsequently the leachate is neutralized by an alkali solution so as to form a composite hydroxide of In, Ga, and Zn, and after drying the composite hydroxide is roasted so as to obtain the composite oxide of In, Ga, and Zn.
Inventors:
SATO HITOSHI
GOHARA TAKESHI
GOHARA TAKESHI
Application Number:
JP2013061636A
Publication Date:
October 02, 2014
Filing Date:
March 25, 2013
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP
International Classes:
C01G15/00; C04B35/00; C22B1/02; C22B3/04; C22B3/42; C22B3/44; C22B7/00; C22B19/30; C22B58/00
Domestic Patent References:
| JP2012193396A | 2012-10-11 | |||
| JP2012193397A | 2012-10-11 | |||
| JP2000226623A | 2000-08-15 | |||
| JPH11302835A | 1999-11-02 | |||
| JP2001040434A | 2001-02-13 | |||
| JP2012193396A | 2012-10-11 | |||
| JP2012193397A | 2012-10-11 | |||
| JP2000226623A | 2000-08-15 | |||
| JPH11302835A | 1999-11-02 | |||
| JP2001040434A | 2001-02-13 |
Foreign References:
| WO2010140548A1 | 2010-12-09 |
Attorney, Agent or Firm:
Isamu Ogoshi
Kazuteru Ogoshi
Kazuteru Ogoshi