Title:
RELAXガス放電レーザリソグラフィ光源
Document Type and Number:
Japanese Patent JP5357393
Kind Code:
B2
Abstract:
An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a dispersive center wavelength selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of a first spatially defined portion of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; and, the tuning mechanism comprising a variably refractive optical element defining a plurality of refractive angular displacements of the first spatially defined portion of the laser light pulse beam passing through the variably refractive optical element at one of a plurality of positions of incidence of the laser light pulse beam on the variably refractive optical element. The variably refractive optical element may comprise: a first generally flat face defining a surface of incidence for the laser light pulse beam; and, a second multifaceted or curved face defining a plurality of generally flat surfaces of exit or a continuously varying surface of exit for the laser light beam. Other aspects of pulse parameter metrology and pulse modulation control, including in response to signals from the utilization tool are disclosed, e.g., relating to proper dose control with differing center wavelength spectra.
Inventors:
Sandstrom Richard El
Partro William N
Brown Daniel Jay W
Jaeger Thomas A
Aashoff Alexander Eye
La Fuck Robert Jay
Lilov German E
Partro William N
Brown Daniel Jay W
Jaeger Thomas A
Aashoff Alexander Eye
La Fuck Robert Jay
Lilov German E
Application Number:
JP2006538219A
Publication Date:
December 04, 2013
Filing Date:
October 27, 2004
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
B23K26/06; H01S3/137; B23K26/40; G01J1/42; G01J9/02; G02B26/00; G02B26/08; G03F7/20; H01L21/027; H01S3/00; H01S3/134; H01S3/22; H01S3/225; H01S3/1055; H01S
Domestic Patent References:
| JP2003051634A | ||||
| JP2004537176A | ||||
| JP2003224320A |
Foreign References:
| WO2003011595A1 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda