収縮による熱分離を有する放射検出器およびその放射検出器を用いた赤外線検出装置 - INSERM(INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICALE)

Title:

収縮による熱分離を有する放射検出器およびその放射検出器を用いた赤外線検出装置

Document Type and Number:

Japanese Patent JP4897269

Kind Code:

B2

Abstract:

The detector has a bolometric membrane (2) whose resistivity varies with temperature. Pillars (3) have upper ends fixed directly on an intermediate frame (9). The frame has micropoints (7) whose tapered ends are in contact with the membrane in order to form a thermal flow constriction zone between the membrane and a substrate receiving a reading circuit. The frame and micropoints are made up of an electrically conductive material. An independent claim is also included for an infrared radiation detection device integrating several bolometric detectors.

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Inventors:

Jean-Louis Ovrier-Buffet
Sylvet Bisotto

Application Number:

JP2005315319A

Publication Date:

March 14, 2012

Filing Date:

October 28, 2005

Export Citation:

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Assignee:

INSERM(INSTITUT NATIONAL DE LA SANTE ET DE LA RECHERCHE MEDICALE)

International Classes:

G01J5/20; G01J1/02; H01L37/00

Domestic Patent References:

JP10185681A
JP2003106896A
JP11337403A
JP2003530538A
JP2002365129A

Foreign References:

WO2004025694A2

Attorney, Agent or Firm:

Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro

Previous Patent: JPS4897268

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