Title:
放射線検出器
Document Type and Number:
Japanese Patent JP4571267
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a radiation detector for larger area where radiation is detected. SOLUTION: A photodiode array 1 comprises P+ diffusion layers 4 and 5, N+ channel stop layers 6 and 7, N+ diffusion layer 8 and the like. The P+ diffusion layers 4 and 5 and the N+ channel stop layers 6 and 7 are provided on the rear surface side to the incident surface of a semiconductor board 3. The N+ channel stop layer 6 is so provided in lattice shape between adjoining P+ diffusion layers 4 and 5 as to separate them. The N+ channel stop layer 7 is so provided in frame as to be continuous to the N+ channel stop layer 6 outside the array of the P+ diffusion layer 5. The N+ channel stop layer 7 is wider than the N+ channel stop layer 6. A scintillator is optically connected to the incident surface of the semiconductor board 3.
Inventors:
Yasuto Yoneda
Hiroshi Akahori
Masaharu Muramatsu
Hiroshi Akahori
Masaharu Muramatsu
Application Number:
JP2000102620A
Publication Date:
October 27, 2010
Filing Date:
April 04, 2000
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01T1/20; H01L31/09; G01T1/29; H01L27/14; H01L27/146; H04N5/32
Domestic Patent References:
| JP10209417A | ||||
| JP6140613A | ||||
| JP3148869A | ||||
| JP9331051A |
Foreign References:
| US5777352 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Tatsuya Shioda
Shiro Terasaki