Title:
感放射線性組成物
Document Type and Number:
Japanese Patent JP5446118
Kind Code:
B2
Inventors:
Echigo Masatoshi
Koguro Large
Koguro Large
Application Number:
JP2008110680A
Publication Date:
March 19, 2014
Filing Date:
April 21, 2008
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C07C39/17; C07C39/42; C07C215/70; G03F7/004; G03F7/038; G03F7/039; G03F7/11; H01L21/027
Domestic Patent References:
| JP2003321423A | ||||
| JP11322656A | ||||
| JP10161348A | ||||
| JP10161349A | ||||
| JP2007197389A | ||||
| JP5109338B2 | ||||
| JP2005170902A | ||||
| JP10503770A |
Foreign References:
| WO2006110173A1 |
Other References:
Journal of Organic Chemistry,1989年,54(6),p.1305-1312
Journal of the American Chemical Society,1989年,111(10),p.3688-3699
Journal of the American Chemical Society,1989年,111(10),p.3688-3699