Title:
感放射線性樹脂組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6369301
Kind Code:
B2
Inventors:
Ikui Junto
Application Number:
JP2014236027A
Publication Date:
August 08, 2018
Filing Date:
November 20, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/038; C08F220/18; G03F7/039; G03F7/32
Domestic Patent References:
| JP2002309057A | ||||
| JP2013205806A | ||||
| JP2015025879A | ||||
| JP2005107476A | ||||
| JP2000191601A | ||||
| JP2008292975A | ||||
| JP2014044414A | ||||
| JP2014035413A |
Foreign References:
| WO2013147266A1 | ||||
| WO2013069750A1 |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka