Title:
感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4370898
Kind Code:
B2
Inventors:
Takashi Chiba
Tsutomu Shimokawa
Akihiro Hayashi
Norihiko Sugie
Tsutomu Shimokawa
Akihiro Hayashi
Norihiko Sugie
Application Number:
JP2003420199A
Publication Date:
November 25, 2009
Filing Date:
December 17, 2003
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08G77/24; G03F7/039; C07C35/52; C07F7/18; G03F7/075; H01L21/027
Domestic Patent References:
| JP2000508080A | ||||
| JP11302382A |
Other References:
C. Grant Willson, et al.,The Design of Resist Materials for 157nm Lithography,Journal of Photopolymer Science and Technology,2002年,Vol.15, No.4,p.583-590
Attorney, Agent or Firm:
Toshiaki Fukuzawa