Title:
RADIATION-SENSITIVE SULFONATE AND ITS USE
Document Type and Number:
Japanese Patent JP3133152
Kind Code:
B2
Abstract:
PURPOSE: To obtain a radiation-sensitive recording material having high resolution and sensitivity for a wide spectral region.
CONSTITUTION: A negative radiation-sensitive mixture containing the following components is prepared. The components are (a) a compd. which produces strong acid by exposure to active radiation, (b) a compd. having at least two groups which can be crosslinked by acid, and (c) a polymer binder which is insoluble water and soluble or at least swellable with an alkali soln. The compd. (a) is expressed by formula I or formula II which is an ester between sulfonic acid such as R-SO3H or R'(-SO3H)2 and 2,4-bis-trichloromethyl-6-(mono or dihydroxyphenyl)-1,3,5-triazine. In formulae I, R is a 1 to 10C alkyl group, etc., which may have substituents if required, and R' is a 1 to 10C alkylene group, etc., which may have substituents if required, and (n) is 1 or 2.
Inventors:
Georg, Pauluski
Horst, Leschelt
Walter, Spies
Klaus-Jergen, Pulzivilla
Horst, Leschelt
Walter, Spies
Klaus-Jergen, Pulzivilla
Application Number:
JP15977392A
Publication Date:
February 05, 2001
Filing Date:
June 18, 1992
Export Citation:
Assignee:
Clariant Gembehr
International Classes:
G03F7/004; C07D251/24; C09D161/06; G03F7/00; G03F7/029; G03F7/038; H01L21/027; C08L61/06; C08L61/28; (IPC1-7): G03F7/004; C07D251/24; G03F7/00; G03F7/038; H01L21/027
Domestic Patent References:
| JP60105667A | ||||
| JP2217855A |
Attorney, Agent or Firm:
Kazuo Sato (3 others)