Title:
放射線感応性レジスト組成物
Document Type and Number:
Japanese Patent JP4309532
Kind Code:
B2
Inventors:
Toshiyuki Ogata
Hiroshi Komano
Hiroshi Komano
Application Number:
JP32871099A
Publication Date:
August 05, 2009
Filing Date:
November 18, 1999
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; H01L21/027; C08F32/00; C08K5/00; C08L45/00
Domestic Patent References:
| JP11295892A | ||||
| JP10218941A | ||||
| JP11184091A | ||||
| JP10207070A |
Attorney, Agent or Firm:
Aun Agata
Takatoshi Mizuguchi
Takatoshi Mizuguchi
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