Title:
RADIATION SOURCE UNIT AND APPARATUS USING THEREOF
Document Type and Number:
Japanese Patent JP3493233
Kind Code:
B2
Abstract:
PURPOSE: To provide a radiation source unit of which frequency difference can be adjusted in a wide range without being affected by position shift of component elements.
CONSTITUTION: A radiation source unit generates radiation source beam 30 having two beam components 9, 10 having different frequencies and polarized in mutually rectangular directions. This unit comprises a radiation source, a beam splitter 4, acoustic optical modulators 13, 18 to generate frequency difference, and a beam coupling element 25. The beam splitter 24 and the beam coupling element 25 are transmission type elements and since the connection line of these elements passes the center of a modulation apparatus, the unit can be miniaturized and at the same time no trouble of alignment occurs. Moreover, the frequency can be adjusted in a wide range.
Inventors:
Pieter Dirksen
Manfred Howane Tennel
Jan Efert van der Welf
Manfred Howane Tennel
Jan Efert van der Welf
Application Number:
JP31188694A
Publication Date:
February 03, 2004
Filing Date:
December 15, 1994
Export Citation:
Assignee:
Konin Krekka Philips Electronics NV
International Classes:
G01B9/02; G02F1/33; G02F2/02; G03F9/00; G11B7/135; H01S5/00; (IPC1-7): G01B9/02; G02F2/02; G11B7/135; H01S5/00
Domestic Patent References:
| JP3139672A | ||||
| JP32504A | ||||
| JP474838A |
Attorney, Agent or Firm:
Kosugi Sugimura (4 others)