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Title:
RADIO DEVICE AND METHOD FOR CALIBRATING TEMPERATURE SENSOR
Document Type and Number:
Japanese Patent JP3461868
Kind Code:
B2
Abstract:

PURPOSE: To provide a radio-type calibration device to be applied to an automatic wafer treatment process, without requiring any manual operation by providing the device with an wafer having plural calibration islands and providing these islands with melting points in a specific range.
CONSTITUTION: An wafer, having plural 1st calibration islands 36 consisting of a material having a melting point in a range of 150 to 1150°C, is prepared. The effective reflectivity factor for the wafer in operation is measured by a temperature sensor or through an individual light source. A 1st step-type change of an output signal from the temperature sensor which corresponds to an wafer temperature equal to the melting point of the 1st calibration islands is detected. Finally, the calibration parameter of the temperature sensor is calculated. Consequently, automatic wafer treatment for calibration processing can be executed.


Inventors:
Mehrdad, Moslehi M.
Najm, Habib
Velo, Lino A.
Application Number:
JP1993000198561
Publication Date:
August 15, 2003
Filing Date:
August 10, 1993
Export Citation:
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Assignee:
TEXAS INSTR INC <TI>
International Classes:
G01K15/00; G01J5/52; H01L21/26; H01L21/324; H01L21/66; G01J5/00; (IPC1-7): H01L21/26; G01K15/00; H01L21/66
Other References:
Rev.Sci.Instrum.,1992年 1月,63(1),pp.188−190
Attorney, Agent or Firm:
浅村 皓 (外3名)



 
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