Title:
液晶ディスプレイ等の製造工程におけるガラス基盤面の急速且つ高精度調温装置
Document Type and Number:
Japanese Patent JP5465701
Kind Code:
B2
Inventors:
Keiichi Uemura
Application Number:
JP2011177045A
Publication Date:
April 09, 2014
Filing Date:
August 12, 2011
Export Citation:
Assignee:
Uemura Industry Co., Ltd.
International Classes:
G03F7/20; G02F1/13; H01L21/027
Domestic Patent References:
| JP2002072492A | ||||
| JP2001085323A | ||||
| JP5013294A |
Attorney, Agent or Firm:
Ikuji Nagashima