Title:
RAPID REGENERATIVE CRYOPUMP
Document Type and Number:
Japanese Patent JP3884108
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To considerably shorten time required for temperature rise of a gas suction face and for cooling at the time of regenerating work by providing a diaphragm driving means for attaching/detaching a diaphragm provided at the upper face of a cryopanel.
SOLUTION: In case of exhaust performance being lowered due to the progress of agglutination of gas to the upper face of a diaphragm 2, a rapid regenerative cryopump 1 is regenerated. When a current is carried from a conductor 3e to raise the temperature of a coil 3d, the coil 3d is elongated by the action of a shape memory alloy so as to lift the diaphragm 2 through a connecting rod 3b and a ring body 2a. With the lapse of time, heat of the coil 3d reaches the ring body 2a via a heat buffer 3c so as to raise the temperature of the diaphragm 2, but since the diaphragm 2 is separated from a cryopanel 1b at this time, there is no generation of such defectiveness that the cryopanel 1b cooled to extremely low temperature is heated by heat transfer or radiation from the diaphragm 2.
Inventors:
Masashi Iguchi
Application Number:
JP25385696A
Publication Date:
February 21, 2007
Filing Date:
September 04, 1996
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Domestic Patent References:
| JP63124880A |
Attorney, Agent or Firm:
Teruaki Koyama
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