Title:
RARE-EARTH-ELEMENT BORIDE MEMBER AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2011195337
Kind Code:
A
Abstract:
To solve the following problem: a sintered compact of a rare-earth-element boride, in particular, LaB6 is unsuitable as a sputtering member or the like because pollutant is present therein in a large amount.
On the basis of a new view wherein contamination of a conventional LaB6 sintered compact is attributed to large amount of pores present in the sintered compact, a member with few contaminants can be formed by pressing an LaB6 compact in a hot press furnace and then subjecting to HIP treatment thereby reducing pores to attain a porosity of ≤7 vol.%, preferably ≤1 vol.%.
Inventors:
OMI TADAHIRO
GOTO TETSUYA
KONISHI MIKIRO
ANDO KAZUTO
GOTO TETSUYA
KONISHI MIKIRO
ANDO KAZUTO
Application Number:
JP2008173232A
Publication Date:
October 06, 2011
Filing Date:
July 02, 2008
Export Citation:
Assignee:
UNIV TOHOKU
SUMITOMO OSAKA CEMENT CO LTD
SUMITOMO OSAKA CEMENT CO LTD
International Classes:
C01B35/04; H01J61/06
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda
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