RAW MATERIAL FOR CHEMICAL VAPOR DEPOSITION COMPRISING HETEROGENEOUS DINUCLEAR COMPLEX, AND CHEMICAL VAPOR DEPOSITION METHOD USING RAW MATERIAL FOR CHEMICAL VAPOR DEPOSITION

Title:

RAW MATERIAL FOR CHEMICAL VAPOR DEPOSITION COMPRISING HETEROGENEOUS DINUCLEAR COMPLEX, AND CHEMICAL VAPOR DEPOSITION METHOD USING RAW MATERIAL FOR CHEMICAL VAPOR DEPOSITION

Document Type and Number:

Japanese Patent JP2016211049

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a raw material for chemical vapor deposition capable of forming a thin film comprising a composite metal by one time deposition at a low temperature (approximately 200°C).SOLUTION: There is provided a raw material for chemical vapor deposition shown by the following formula, and comprising a heterogeneous dinuclear complex in which cyclopentadienyl or carbonyl is coordinated to a first transition metal and a second transition metal which are central metals. The first transition metal (M) and the second transition metal (M) are mutually different. The cyclopentadienyl (L) is 1 or 2, and H or an alkyl group of C1-5 is coordinated thereto each independently as a substituent group R-R.SELECTED DRAWING: Figure 2

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Inventors:

HARADA RYOSUKE
SHIGETOMI TOSHIYUKI
NABEYA SHUNICHI
SUZUKI KAZUHARU
KUMAKURA AKIKO
AOYAMA TATSUKI
SONE TAKAYUKI

Application Number:

JP2015096981A

Publication Date:

December 15, 2016

Filing Date:

May 12, 2015

Export Citation:

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Assignee:

TANAKA PRECIOUS METAL IND

International Classes:

C23C16/06; C07F13/00; C07F15/00; C07F15/02; C07F15/06; C07F17/00; C07F19/00; C23C16/18

Domestic Patent References:

JP2006328526A	2006-12-07
JP2006328526A	2006-12-07

Foreign References:

US5171610A

1992-12-15

Other References:

JPN6016026989; ＬＩＵ　Ｄａｖｉｄ　Ｋ．: 'Ｐｈｏｔｏｃｈｅｍｉｃａｌ　ｖａｐｏｒ　ｄｅｐｏｓｉｔｉｏｎ　ｏｆ　ｍｉｘｅｄ-ｍｅｔａｌ　ｔｈｉｎ　ｆｉｌｍｓ　ｆｒｏｍ　ｏｒｇａｎｏｍｅｔａｌｌｉｃ　ｐｒｅｃｕｒｓｏｒｓ　ｃｏｎｔａｉｎｉｎｇ　ｈ' Ｍａｔｅｒｉａｌｓ　ＬｅｔｔｅｒｓＶｏｌ．　１０　ｎｕｍｂｅｒ　７，　８, 199101, Ｐ．　３１８-３２２
JPN6016026988; ＳＨＹＵ　Ｓｈｉｎ-Ｇｕａｎｇ: 'Ｍｉｘｅｄ-ｍｅｔａｌ　ｏｘｉｄｅ　ｆｉｌｍｓ　ｖｉａ　ａ　ｈｅｔｅｒｏｂｉｍｅｔａｌｌｉｃ　ｃｏｍｐｌｅｘ　ａｓ　ａｎ　ＭＯＣＶＤ　ｓｉｎｇｌｅ-ｓｏｕｒｃｅ　ｐｒｅｃｕｒｓｏｒ' Ｃｈｅｍｉｃａｌ　Ｃｏｍｍｕｎｉｃａｔｉｏｎｓ , 1996, Ｐ．　２２３９-２２４０

Attorney, Agent or Firm:

Patent business corporation Tanaka, Okazaki and Associates

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