Title:
低誘電率材料形成用原料
Document Type and Number:
Japanese Patent JP5224738
Kind Code:
B2
Inventors:
Shinji Eiji
Teruhiko Kumada
Toshiyuki Toyoshima
Naoki Yasuda
Wei Nagae
Teruhiko Kumada
Toshiyuki Toyoshima
Naoki Yasuda
Wei Nagae
Application Number:
JP2007173966A
Publication Date:
July 03, 2013
Filing Date:
July 02, 2007
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
C08G79/08; C23C16/38; H01L21/312; H01L21/318; H01L21/768; H01L23/532
Domestic Patent References:
| JP2000340689A | ||||
| JP6147735A | ||||
| JP1290510A | ||||
| JP3710599B1 | ||||
| JP2002317049A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka