Title:
REACTION FORCE PROCESSING SYSTEM FOR STAGE APPARATUS
Document Type and Number:
Japanese Patent JP3940388
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a reaction force processing system for a stage apparatus which obtains a stable and high positioning performance even if a movable part is located at any position.
SOLUTION: The reaction force processing system for suppressing a vibration of a base due to a reaction force generated by driving an X slider in the stage apparatus having the base 20 installed on a fixed floor via a vibration removing means, and the X slider 25 constituted of a linear motor 26 on the base so as to be movable in an at least monoaxial direction. The reaction force processing system includes a plurality of reaction force processing actuators 21-1 to 21-4 installed on the fixed floor side for giving a thrust force in a direction for canceling the reaction fore to the base, and a control system 10 for giving a thrust force command value F to the linear motor and giving a thrust force command value regulated after a gain regulating unit 15 having a variable gain of the thrust force command value F to the plurality of the reaction force processing actuators.
Inventors:
Hideo Nishimoto
Makoto Kaneko
Makoto Kaneko
Application Number:
JP2003285754A
Publication Date:
July 04, 2007
Filing Date:
August 04, 2003
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G03F9/00; G03F7/20; G05D3/12; H01L21/027; H01L21/68; H02K33/00; H02K33/16; H02K41/02; H02P7/00; H02P25/06; (IPC1-7): H02P7/00; G03F9/00; H01L21/027; H01L21/68; //G05D3/12
Domestic Patent References:
| JP11329962A | ||||
| JP10311364A |
Attorney, Agent or Firm:
Kenho Ikeda
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