Title:
REACTION FURNACE
Document Type and Number:
Japanese Patent JPS52114567
Kind Code:
A
Abstract:
PURPOSE: To increase reaction capacity of a reaction gas with a sample by equipping at least one inlet for the reaction gas at the center of a reaction furnace which is long sideways and an outlet at each side of the gas inlet.
Inventors:
NAGATOMO HIROTO
AKIBA MASAKUNI
MISONOO YUKIO
AKIBA MASAKUNI
MISONOO YUKIO
Application Number:
JP3120676A
Publication Date:
September 26, 1977
Filing Date:
March 24, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C30B25/14; C23C16/54; F27B9/00; H01L21/205; (IPC1-7): B01J17/32; F27B9/00; H01L21/205