PURPOSE: To obtain a reactor excelling in heat resistance, high temperature strength and the like and capable of continuous, stable operation for a long time by forming the reactor of a carbon base material and also coating the surface exposed to a high temperature of the reactor with a silicon carbide film.
CONSTITUTION: A reaction pipe 1 is formed out of a carbon base material, and also at least the inner surface thereof is coated with a silicon carbide film. It is preferable that a dispersing plate, a raw material feed plate 7 and a product discharge pipe 8 arranged inside the reaction pipe 1 are also formed out of a carbon base material and also the surface exposed to reaction gas is coated with a silicon carbide film. The thickness of the silicon carbide film is made ≥0.3mm by the CVR method. In this way, a high temperature reactor which is effective for stably producing non-oxide powder of high quality for a long time is provided.
FUKUOKA HIROFUMI
FUKUHIRA MASANORI
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