To provide a recessed/projected pattern detecting element for making a front surface flat without increasing a production process and without limiting the material of a protection film.
A TFT 9 which is connected to a gate electrode 2 and a data electrode 3 formed in a grid shape and which is arranged at each grid, an inter-layer insulating film 10 which is formed on the TFT 9 and penetrated by a contact hole 12 and a detection electrode 11 which is disposed on the inter-layer insulating film 10 and penetrates the contact hole 12 are formed on an insulating substrate 1. An upper layer insulating film 16 is formed on the inter-layer insulating film 10 and covers the detection electrode 11. A surface where the detection electrode 11 is formed is made to be flat on the inter-layer insulating film 10.
TERANUMA OSAMU