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Patent Searching and Data


Title:
RECESSED AND PROJECTED PATTERN DETECTING ELEMENT
Document Type and Number:
Japanese Patent JP2002358511
Kind Code:
A
Abstract:

To provide a recessed/projected pattern detecting element for making a front surface flat without increasing a production process and without limiting the material of a protection film.

A TFT 9 which is connected to a gate electrode 2 and a data electrode 3 formed in a grid shape and which is arranged at each grid, an inter-layer insulating film 10 which is formed on the TFT 9 and penetrated by a contact hole 12 and a detection electrode 11 which is disposed on the inter-layer insulating film 10 and penetrates the contact hole 12 are formed on an insulating substrate 1. An upper layer insulating film 16 is formed on the inter-layer insulating film 10 and covers the detection electrode 11. A surface where the detection electrode 11 is formed is made to be flat on the inter-layer insulating film 10.


Inventors:
IZUMI YOSHIHIRO
TERANUMA OSAMU
Application Number:
JP2002050071A
Publication Date:
December 13, 2002
Filing Date:
February 26, 2002
Export Citation:
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Assignee:
SHARP KK
International Classes:
A61B5/117; G06T1/00; H01L27/12; H01L29/84; G01B7/28; (IPC1-7): G06T1/00; A61B5/117; G01B7/28; H01L29/84
Attorney, Agent or Firm:
Kenzo Hara