Title:
ウェーハ処理システムのレシピ・カスケーディング
Document Type and Number:
Japanese Patent JP4903553
Kind Code:
B2
Abstract:
The invention allows a cluster tool to change from a first recipe to a second recipe, while preserving periodicity and ensuring that there are no delays at critical points. This procedure is referred to as recipe cascading. Cascading involves emptying a first lot of wafers off a cluster tool and populating the cluster tool with another lot of wafers, serially and simultaneously. The procedure is performed with no delays incurred at critical process steps; and with no additional robots and process modules other than those called for by the recipe and throughput requirements of the entering and the exiting lots. The entering lot may also have different recipes and throughput requirements from the exiting lot. A program residing on a computer determines a schedule for the cluster tool which enables recipe cascading. The program may use a genetic algorithm to determine the schedule, or any other optimization technique.
Inventors:
Oh Hilario
Application Number:
JP2006354540A
Publication Date:
March 28, 2012
Filing Date:
December 28, 2006
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
H01L21/02; G05B19/418; G06F19/00; H01L21/00
Domestic Patent References:
| JP11163087A | ||||
| JP11045926A | ||||
| JP10303126A | ||||
| JP10199960A | ||||
| JP10135098A | ||||
| JP8153765A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki