Title:
レシピ作成システム、及びレシピ作成方法
Document Type and Number:
Japanese Patent JP5203650
Kind Code:
B2
Abstract:
There is provided a recipe generation apparatus and method for reducing the time required to reflect an optimal value and changed value in an input file by automatically reflecting a value obtained by optimizing an input file for recipe generation in the input file for recipe generation. This invention eliminates the inconvenience of manually reflecting changes in an input file for recipe generation by automatically reflecting changed values in the input file for recipe generation after editing a provisionally generated off-line recipe and achieves a reduction in processing time. This invention also provides a method for automatically generating an off-line recipe and a file for recipe generation from a recipe of a scanning electron microscope (see FIG. 3).
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Inventors:
Hiromi Fujita
Hitoshi Komuro
Toshikazu Kawahara
Hitoshi Komuro
Toshikazu Kawahara
Application Number:
JP2007199428A
Publication Date:
June 05, 2013
Filing Date:
July 31, 2007
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/66; G01B15/00
Domestic Patent References:
| JP2007003212A | ||||
| JP2006351746A | ||||
| JP2004031709A |
Attorney, Agent or Firm:
Yusuke Hiraki