Title:
Reciprocation type pump
Document Type and Number:
Japanese Patent JP6150477
Kind Code:
B2
Inventors:
Taisuke Osaka
Yusaku Tanabe
Yusaku Tanabe
Application Number:
JP2012180397A
Publication Date:
June 21, 2017
Filing Date:
August 16, 2012
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F04B11/00; F04B43/02
Domestic Patent References:
| JP2005016367A | ||||
| JP7119639A | ||||
| JP2000274374A | ||||
| JP2000038986A | ||||
| JP6178287U |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira