REDUCED-PRESSURE DRYING APPARATUS

Title:

REDUCED-PRESSURE DRYING APPARATUS

Document Type and Number:

Japanese Patent JP2012132678

Kind Code:

A

Abstract:

To provide a reduced-pressure drying apparatus introducing workpieces to which part of washing water is deposited into a closed container and reduced-pressure drying deposited water in which actually required drying time can be quantitatively grasped.

An allowable deposited water quantity w is set at ST01. The second pressure p2 is decided by substituting the w into the second equation (ST02). Wet workpieces are reduced-pressure dried (ST05), the third pressure p3 is measured (ST08). It is determined to be acceptance when the third pressure p3 is not higher than the second pressure p2 (ST10) and it si determined to be not acceptance (ST11) when the third pressure p3 is higher than the second pressure p2.

Inventors:

SANUKI MITSUHIRO
ISHII IKUO
ISHIKAWA TETSUYA

Application Number:

JP2012087046A

Publication Date:

July 12, 2012

Filing Date:

April 06, 2012

Export Citation:

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