Title:
凝縮粒子カウンタにおける偽カウントの低減
Document Type and Number:
Japanese Patent JP7078701
Kind Code:
B2
Abstract:
Various embodiments include methods and apparatuses to reduce false-particle counts in a water-based condensation particle counter (CPC). In one embodiment, a cleanroom CPC has three parallel growth tube assemblies. A detector is coupled to an outlet of each of the three parallel growth tube assemblies, and is used to compare the particle concentrations measured from each of the three growth tube assemblies. An algorithm compares the counts from the three detectors and determines when the particles counted are real and when they are false counts. Any real particle event shows up in all three detectors, while false counts will only be detected by one detector. Statistics are used to determine at which particle count levels the measured counts are considered to be real versus false. Other methods and apparatuses are disclosed.
Inventors:
Remears, Richard
Farmer, Kenneth
Farmer, Kenneth
Application Number:
JP2020208043A
Publication Date:
May 31, 2022
Filing Date:
December 16, 2020
Export Citation:
Assignee:
TSI INCORPORATED
International Classes:
G01N15/06; G01N15/14
Domestic Patent References:
| JP6522864B1 | ||||
| JP2004354370A | ||||
| JP2008020456A | ||||
| JP2006201075A | ||||
| JP2018509637A |
Foreign References:
| US20090009748 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda
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