Title:
REFERENCE WAVE GENERATING OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP2002006209
Kind Code:
A
Abstract:
To enable changing a radius of curvature at emitting reference plane wave in a wide range while keeping high accuracy, and also, to enable measuring an object to be inspected at an optional position dispensing with a large working space.
The system is provided with a 1st lens group arranged on the incident side of laser light emitted from a laser interferometer main body and a 2nd lens group arranged on the exit side, and also, the 1st lens group 1 and the 2nd lens group 2 are arranged so that a metric space D6 between them may be varied, and the system is constituted so that the curvature of the coherent spherical wave projected from the 2nd lens group 2 may be optionally and continuously changed.
More Like This:
| JP2006275868 | SPECKLE INTERFEROMETRY SYSTEM |
| JPH0625652 | INDUSTRIAL APPLICABILITY: Optical gap measurement method |
| JP6246875 | Measuring device |
Inventors:
MIYAZAWA NOBUYUKI
TSUBONO KAZUNARI
HIRANO TORU
MATSUSHITA YASUSHI
TSUBONO KAZUNARI
HIRANO TORU
MATSUSHITA YASUSHI
Application Number:
JP2000186339A
Publication Date:
January 09, 2002
Filing Date:
June 21, 2000
Export Citation:
Assignee:
CANON KK
International Classes:
G01B9/02; G01J9/02; G01M11/00; G02B9/64; (IPC1-7): G02B9/64; G01B9/02; G01M11/00
Attorney, Agent or Firm:
Takanashi Yukio