Title:
REFLECTING ELEMENT, AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2006029915
Kind Code:
A
Abstract:
To provide a reflecting element used favorably for correcting an illuminance unevenness in an optical system.
This reflecting element 10 comprising an aggregate of a plurality of unit reflecting bodies 11, and has a reflecting face 10a constituted of respective reflecting faces of the plurality of unit reflecting bodies 11. Respective reflectances of the plurality of unit reflecting bodies 11 are regulated individually.
Inventors:
KOMIYA TAKEHARU
Application Number:
JP2004207351A
Publication Date:
February 02, 2006
Filing Date:
July 14, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
G21K1/06; G02B5/08; G02B5/10; G03F7/20; G21K5/00; G21K5/02; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi