Title:
REFLECTING MEMBER BY MULTILAYER FILM
Document Type and Number:
Japanese Patent JP2006162362
Kind Code:
A
Abstract:
To provide a reflecting member by a multilayer film, especially an EUV multilayer film mirror, capable of acquiring a high reflectivity, even in the case of a multilayer film formed by ion beam sputtering or magnetron sputtering.
In this reflecting member by the multilayer film, an intermediate layer 4 having an intermediate refractive index between two material layers is interposed between the two material layers one of which has a relatively low refractive index and the other of which has a relatively high refractive index in a used wavelength area of a soft X-ray, and such layers are laminated repeatedly in due order. The intermediate layer is constituted of boron carbide including an alkali metal or a compound of the alkali metal.
Inventors:
ANDO KENJI
KANAZAWA HIDEHIRO
TERANISHI KOJI
IMAI TAKAKO
MIURA TAKAYUKI
TAKADA KAZUE
KANAZAWA HIDEHIRO
TERANISHI KOJI
IMAI TAKAKO
MIURA TAKAYUKI
TAKADA KAZUE
Application Number:
JP2004352307A
Publication Date:
June 22, 2006
Filing Date:
December 06, 2004
Export Citation:
Assignee:
CANON KK
International Classes:
G21K1/06; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Tatsuya Nagao