Title:
REFLECTING MIRROR DEVICE
Document Type and Number:
Japanese Patent JPH02101402
Kind Code:
A
Abstract:
PURPOSE:To variably set the curvature of a reflecting surface by an impressed voltage and to simplify an external driving system and control system by using a displacing part consisting of a thin insulating film and electrode layer to constitute the reflecting mirror part which is deformed to a recessed shape by the electrostatic attraction force generated when the voltage is impressed between a pair of electrodes. CONSTITUTION:A cavity 4 is formed to a substrate 1 in correspondence to the central part 5 of the thin insulating film 2 and the electrode layer 3 and is so set that the central part 5 can be displaced in the thickness direction. The electrode layer 7 is formed via the thin insulating film to the bottom surface of this cavity 4. The central part 5 constitutes the reflecting mirror part 5 which is deformed to the recessed shape by the electrostatic attraction force generated when the voltage V is impressed between the electrode layers 3 and 7. Then reflecting mirror part 5 is deformed from a plane mirror to a concave mirror by the impressed voltage V in this way and the curvature thereof can be controlled by the magnitude of the impressed voltage V. The need for the large-scale systems as the external driving system and control system is eliminated.
Inventors:
FUJIMOTO AKIRA
HIRANO MASAO
SUNAKAWA YOSHITOSHI
OBA MASATOSHI
HIRANO MASAO
SUNAKAWA YOSHITOSHI
OBA MASATOSHI
Application Number:
JP25610988A
Publication Date:
April 13, 1990
Filing Date:
October 11, 1988
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
G02B5/10; G02B26/00; (IPC1-7): G02B5/10
Attorney, Agent or Firm:
Namba Kunihide (1 person outside)