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Title:
REFLECTING TYPE OPTICAL APPARATUS
Document Type and Number:
Japanese Patent JP2000275008
Kind Code:
A
Abstract:

To obtain a reflecting type optical apparatus which can be more highly accurately optically registered by detecting to which point on a reflecting face of a reflecting type optical element the light is shed.

In this reflecting type optical apparatus, a light 5 is obliquely brought to a reflecting face of a reflecting type optical element 1 and the incident light 5 is reflected by the reflecting face. The reflecting type optical apparatus has a photodetector 3 arranged opposite to the reflecting face of the reflecting type optical element 1 for detecting an intensity of a secondary radiation light radiated from the reflecting face when the light 5 is obliquely incident on the reflecting face. The reflecting type optical apparatus can accordingly be optically registered simply and accurately.


Inventors:
RYU KOSUKE
Application Number:
JP8190499A
Publication Date:
October 06, 2000
Filing Date:
March 25, 1999
Export Citation:
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Assignee:
SONY CORP
International Classes:
G01B11/00; (IPC1-7): G01B11/00