Title:
REFLECTION OPTICAL MEMBER, OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011228536
Kind Code:
A
Abstract:
To provide a reflection optical member capable of improving reflection efficiency of a radiation beam, an optical system, an exposure device, and a device manufacturing method.
An emission side fly-eye mirror comprises: a mirror block 50A having emission side mirror elements MA1, MA2, and MA3; a mirror block 50B having an emission side mirror element MB1; mirror blocks 50C and 50E having emission side mirror elements MC1 and ME1, respectively; and a mirror block 50D having emission side mirror elements MD1 and MD2.
Inventors:
FURUYA SHUNSUKE
Application Number:
JP2010098064A
Publication Date:
November 10, 2011
Filing Date:
April 21, 2010
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B17/00; G02B19/00
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda
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