To provide a reflective mask having a light-shielding frame exhibiting high light-shielding effect, and to provide a manufacturing method therefor.

In the manufacturing steps of a reflective mask having a substrate 11, a multilayer reflection layer 21 formed on the front surface of the substrate, and an absorbing layer 51 formed on the multilayer reflection layer, a step for performing laser irradiation from the rear surface of the substrate is provided. Consequently, interface of the multilayer reflection layer 21 is made to disappear and reflection intensity from the rear surface of the substrate is lowered, thus manufacturing a light-shielding frame in which optical properties of the absorbing layer 51 are maintained.