Title:
REFLECTIVE OPTICAL ELEMENT, OPTICAL UNIT, EXPOSURE DEVICE AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2012129319
Kind Code:
A
Abstract:
To provide a reflective optical element in which heat exchange can be carried out quickly, and to provide an optical unit, an exposure device and a method of manufacturing a device.
The optical unit comprises a reflective optical element 43 having a first surface 47 which reflects the exposure light, a second surface 49 different from the first surface 47 and a recess 68 formed in the second surface 49, and a projection member 69 which is in contact, at least, with a part of the bottom surface and the side surface of the recess 68, respectively, and exchanges heat between the reflective optical element 43.
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Inventors:
FURUYA SHUNSUKE
KOMATSUDA HIDEKI
KAWABE YOSHIO
TAKINO HIDEO
KOMATSUDA HIDEKI
KAWABE YOSHIO
TAKINO HIDEO
Application Number:
JP2010278519A
Publication Date:
July 05, 2012
Filing Date:
December 14, 2010
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda