Title:
極端紫外線用反射型フォトマスク
Document Type and Number:
Japanese Patent JP5292747
Kind Code:
B2
Inventors:
Shinpei Tamura
Yo Sakata
Tadashi Matsuo
Yo Sakata
Tadashi Matsuo
Application Number:
JP2007239309A
Publication Date:
September 18, 2013
Filing Date:
September 14, 2007
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L21/027; G03F1/22; G03F1/24
Domestic Patent References:
| JP2003318104A | ||||
| JP2003133205A | ||||
| JP2003257824A | ||||
| JP2006173490A | ||||
| JP2006173446A | ||||
| JP2007005523A | ||||
| JP2007207829A | ||||
| JP2006324268A | ||||
| JP2006049910A | ||||
| JP2003249434A | ||||
| JP2006013280A | ||||
| JP2007184361A | ||||
| JP4010616A | ||||
| JP8293450A | ||||
| JP2003243292A | ||||
| JP2009070860A |
Attorney, Agent or Firm:
Takahashi Hayashi & Partners