Title:
REFLECTOR FOR ULTRAVIOLET REGION AND PROJECTION ALIGNER EMPLOYING IT
Document Type and Number:
Japanese Patent JP2004260081
Kind Code:
A
Abstract:
To provide a reflector for an ultraviolet region in which the time degradation reflection characteristics by the irradiation of light can be suppressed.
In the reflector for the ultraviolet region comprising a metal reflective surface 13, and a mirror body 10 having a dielectric film 15 formed on the surface of the metal reflective surface 13, oxidative reaction on the metal reflective surface 13 is suppressed by providing a section 3 for containing the mirror body 10 and bringing a hydrogen-containing gas atmosphere in the mirror containing section 3.
Inventors:
KOKUBU TAKAO
Application Number:
JP2003051211A
Publication Date:
September 16, 2004
Filing Date:
February 27, 2003
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B5/08; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B5/08; G03F7/20
Attorney, Agent or Firm:
Hiroshi Sano