Title:
REFLEX MIRROR WITH SOFT X-RAY MULTI-LAYER FILM AND OPTICAL SYSTEM USING IT
Document Type and Number:
Japanese Patent JP5080200
Kind Code:
A
More Like This:
Inventors:
IKETAKI YOSHINORI
Application Number:
JP24176791A
Publication Date:
April 02, 1993
Filing Date:
September 20, 1991
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G21K1/06; B32B7/02; G21K1/00; (IPC1-7): G21K1/06; B32B7/02
Attorney, Agent or Firm:
Taiji Shinohara (besides one person)