Title:
REFLOW EQUIPMENT
Document Type and Number:
Japanese Patent JPH10209628
Kind Code:
A
Abstract:
To provide a reflow equipment which allows the degree of freedom to be increased with respect to the time base of a temperature profile, and the requirements of the temperature profile to be met.
A reflow equipment 1 comprises a conveyor 3 for transporting substrates 10 and a furnace 2 for heating the substrates 10. In this reflow equipment, the zones 5-8 in the furnace to be set to different temperature conditions are constituted of one or more furnace units 4. The furnace 2 is composed by coupling these furnace units 4 with one another. The furnace 2 may be composed by coupling with one another zone units comprising a unit conveyor which conveys substrates an arbitrary conveying speed, and a unit furnace for heating the substrates.
Inventors:
MATSUMOTO KUNIYO
ABE TOSHIHIRO
NONOMURA MASARU
CHIKAHISA NAOICHI
ABE TOSHIHIRO
NONOMURA MASARU
CHIKAHISA NAOICHI
Application Number:
JP1273497A
Publication Date:
August 07, 1998
Filing Date:
January 27, 1997
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
F27B9/02; H05K3/34; (IPC1-7): H05K3/34; F27B9/02
Domestic Patent References:
| JPH08195551A | 1996-07-30 | |||
| JPH06164130A | 1994-06-10 | |||
| JPH06224551A | 1994-08-12 |
Attorney, Agent or Firm:
Ishihara Masaru