PURPOSE: To form a thin compd. film contg. F-C bonds having excellent chemical resistance, hydrophobic property, wear resistance, lubricity, etc., on a base material surface by forming a carbon-contg. film on a base material, then generating low- pressure discharge in the presence of a nitrogen fluoride compd. or plasma discharge in a gaseous mixture composed of a hydrocarbon compd. and nitrogen fluoride compd.
CONSTITUTION: A pair of discharge electrodes 4 are disposed to face each other in a vacuum vessel having a discharge path 5. A stainless steel sheet is mounted onto a high-pressure side electrode. Gaseous hydrocarbon such as CH4 is supplied into the vacuum vessel and the plasma discharge 3 is generated by impressing a high-frequency voltage of 13.56MHz from a power supply 2 to the two electrodes 4, 4 to form a thin transparent and hard carbon film on a thin stainless steel sheet. The stainless steel sheet is placed on the opposite side electrode and while the gaseous Ar-NF3 mixture is allowed to flow, the high-frequency voltage is likewise impressed to the electrodes to generate the plasma discharge to fluorinate the thin carbon film. The plasma discharge 3 is otherwise generated in the gaseous mixture composed of the hydrocarbon and nitrogen fluoride to form the thin compd. film contg. the F-C bonds on the base material.
KOKOMA MASUHIRO
KONDO TERUHISA
TOYO TANSO CO