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Title:
REFRIGERANT CONSTANT TEMPERATURE CONTROL DEVICE AND CONTROL METHOD THEREOF
Document Type and Number:
Japanese Patent JPH0521657
Kind Code:
A
Abstract:

PURPOSE: To enable a refrigerant constant temperature control device which continuously feeds refrigerant such as liquid nitrogen of low temperature to continuously feed refrigerant of constant temperature through a piping.

CONSTITUTION: When an object to be cooled 2 is cooled down to a constant temperature with refrigerant 1, an upper limit temperature sensor 4 and a lower limit temperature sensor 5 which are previously set at a certain value and an automatic valve 6 are successively provided to a cold-insulating piping 3 in this sequence starting from the refrigerant feed source. When the temperature of the refrigerant 1 reaches the upper limit of temperature, the automatic valve 6 is opened by signals outputted from the upper limit temperature sensor 4 to start the supply of refrigerant 1 to be the object to be cooled 2. When the refrigerant 1 is cooled to the lower limit of temperature, the automatic valve 6 is closed by signals outputted from the lower limit temperature sensor 5 to stop the supply of refrigerant 1 to the object to be cooled 2.


Inventors:
WADA SADAMITSU
Application Number:
JP17353291A
Publication Date:
January 29, 1993
Filing Date:
July 15, 1991
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
F25D3/10; H01L23/34; H01L23/473; (IPC1-7): F25D3/10; H01L23/34; H01L23/473
Attorney, Agent or Firm:
Teiichi