Title:
REGENERATION METHOD OF CRYOPUMP, CRYOPUMP AND VACUUM DEVICE
Document Type and Number:
Japanese Patent JP2017044107
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology capable of shortening a time of a regeneration process by efficiently discharging a large amount of water content accumulated in a pump container to the outside of the pump container with a simple constitution.SOLUTION: A cryopump has: a pump container 6 which is provided with a cryopanel 7 cooled by a refrigeration machine 3 inside thereof, to which a purge gas can be introduced, and which is connected to a roughing vacuum pump 19; a temperature sensor 22 disposed in the pump container 6 for measuring a temperature inside of the pump container 6; and a control portion 20 controlling a displacement volume by the roughing vacuum pump 19 on the basis of the temperature measured by the temperature sensor 22. The displacement volume in the pump container 6 by the roughing vacuum pump 19 is controlled on the basis of the temperature inside of the pump container 6 measured by the temperature sensor 22, while introducing a purging gas into the pump container 6.SELECTED DRAWING: Figure 1
Inventors:
SUZUKI NAOTO
MURAYAMA YOSHINOBU
FURUYA SHINJI
MURAYAMA YOSHINOBU
FURUYA SHINJI
Application Number:
JP2015166002A
Publication Date:
March 02, 2017
Filing Date:
August 25, 2015
Export Citation:
Assignee:
ULVAC KURAIO KK
International Classes:
F04B37/16; F04B37/08; F25B9/00
Domestic Patent References:
| JPH0914133A | 1997-01-14 | |||
| JPH06346848A | 1994-12-20 |
Attorney, Agent or Firm:
Hideki Abe
Shigeo Ishijima
Shigeo Ishijima