AREA SELECTION IN CHARGED PARTICLE MICROSCOPE IMAGING

Title:

AREA SELECTION IN CHARGED PARTICLE MICROSCOPE IMAGING

Document Type and Number:

Japanese Patent JP2023004971

Kind Code:

A

Abstract:

To provide a device, a system, a method, and a computer readable medium, that are associated with area selections in charged particle microscope (CPM) imaging.SOLUTION: A CPM support device includes: a first logic for generating a first dataset associated with an area of a sample as a result of processing data from a first imaged round of the image by a CPM; a second logic for generating a predictive parameter of the area; and a third logic for determining whether or not a second imaged round of the area is executed by the CPM based on the predictive parameter of the area. In response to the determination of the third logic to execute the second imaged round of the area, the first logic generates a second dataset including a measurement parameter associated with the area as a result of processing data from the second imaged round of the area by the CPM.SELECTED DRAWING: Figure 4

Inventors:

DENG YUCHEN
HOLGER KOHR
MAURICE PEEMEN

Application Number:

JP2022101673A

Publication Date:

January 17, 2023

Filing Date:

June 24, 2022

Export Citation:

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Assignee:

FEI CO

International Classes:

G06Q10/04; G06Q50/04

Attorney, Agent or Firm:

Tadashige Ito
Tadahiko Ito
Osamu Miyazaki

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