REINFORCING STRUCTURE FOR PREVENTING DEFORMATION OF VACUUM CHAMBER

Title:

REINFORCING STRUCTURE FOR PREVENTING DEFORMATION OF VACUUM CHAMBER

Document Type and Number:

Japanese Patent JP2005320594

Kind Code:

A

Abstract:

To constantly keep a relationship of a relative position between equipment and members arranged in a vacuum chamber, by inhibiting the chamber from deforming due to evacuation or an inadequate precision of working.

A vacuum device consists of a vacuum chamber having an outlet, and a substrate dome arranged so as to face the bottom of the vacuum chamber, wherein a reinforcing member is arranged in the inside or periphery of the outlet.

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Inventors:

TAKIMOTO MASAYUKI
KOMURO HIROYUKI
ABE TATSUYA
FUSE YUTAKA
AONAHATA KAZUHITO

Application Number:

JP2004140096A

Publication Date:

November 17, 2005

Filing Date:

May 10, 2004

Export Citation:

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Assignee:

SHOWA SHINKU KK

International Classes:

C23C14/24; (IPC1-7): C23C14/24

Attorney, Agent or Firm:

Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Katsumi Miyama

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