Title:
除去加工装置
Document Type and Number:
Japanese Patent JP7403634
Kind Code:
B2
Abstract:
A removing apparatus includes a table, multiple chucks, a nozzle and a table cover. The table is horizontally provided and configured to be rotated around a vertical rotation center line. The multiple chucks are disposed at a distance therebetween around the rotation center line of the table. The nozzle is configured to supply a processing liquid to a substrate held by the chuck. The table cover is configured to receive the processing liquid from above the table. The table cover has an inclined member of a conical shape having a decreasing height as the inclined member goes away from the rotation center line of the table while having a constant height in a rotation direction.
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Inventors:
Takahiro Sakamoto
Munehisa Kodama
Munehisa Kodama
Application Number:
JP2022509450A
Publication Date:
December 22, 2023
Filing Date:
March 02, 2021
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B24B55/06; B23Q11/00; B24B7/00; B24B7/04; B24B41/06; B24B55/02; H01L21/304
Domestic Patent References:
| JP2013188813A | ||||
| JP2018027593A | ||||
| JP2004079749A | ||||
| JP2010247282A | ||||
| JP2015036162A | ||||
| JP2019058995A | ||||
| JP2019212838A | ||||
| JP2013255952A | ||||
| JP2007229904A | ||||
| JP11114765A | ||||
| JP2268432A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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