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Patent Searching and Data


Title:
REMOVER FOR PHOTORESIST AND/OR ETCHING RESISTANT RESIN COMPOSITION
Document Type and Number:
Japanese Patent JP2001350277
Kind Code:
A
Abstract:

To provide a remover which can remove a photoresist film or an etching resistant resin composition film remaining on the surface of a substrate after etching in a short time, does not cause the tarnish and corrosion of a metallic material used as the substrate and ensures easy washing work and easy waste water treatment because the remover does not use a chelating agent and is less liable to cause foaming in washing and in waste water treatment.

The remover consists of 1-10 wt.% one or more selected from polyols and their derivatives, 0.001-0.1 wt.% one or more selected from anionic surfactants, nonionic surfactants and fluorine-containing surfactants, 5-40 wt.% alkali hydroxide and the balance water.


Inventors:
SHIROYAMA MASAMI
Application Number:
JP2000168597A
Publication Date:
December 21, 2001
Filing Date:
June 06, 2000
Export Citation:
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Assignee:
MITSUWAKA JUNYAKU KENKYUSHO KK
International Classes:
G03F7/42; C09D9/00; C23F1/00; (IPC1-7): G03F7/42; C09D9/00; C23F1/00
Attorney, Agent or Firm:
Hiromasa Iriyama