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Title:
RESIN COATING METHOD AND RESIN COATING APPARATUS
Document Type and Number:
Japanese Patent JP2010119952
Kind Code:
A
Abstract:

To shorten the coating time with respect to a resin coating method and a resin coating apparatus capable of suppressing formation of voids in a resin.

The resin coating method includes: a coating step of coating a first substrate 2 with an underfill material 6 in a coating chamber 31B in a low pressure environment; an atmospheric pressure adjustment step of reducing the pressure in a transportation chamber 31A to a low pressure environment from the atmospheric pressure environment after a second substrate 2 to be treated next is transferred to the transportation chamber 31A; and a transporting step of transporting the second substrate 2 to the coating chamber 31B and transporting the first substrate 2 to the transportation chamber 31A on completion of the coating step.


Inventors:
IKURA KAZUYUKI
UNE JUNZO
MATSUEDA JUN
Application Number:
JP2008295496A
Publication Date:
June 03, 2010
Filing Date:
November 19, 2008
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
B05D3/00; B05C11/00; B05D1/26; H01L21/56
Domestic Patent References:
JPH04233742A1992-08-21
JP2005142210A2005-06-02
JP2005211874A2005-08-11
JP2006128476A2006-05-18
JP2006289355A2006-10-26
JPH04233742A1992-08-21
JP2005142210A2005-06-02
JP2005211874A2005-08-11
JP2006128476A2006-05-18
Attorney, Agent or Firm:
Tadahiko Ito
Akinori Yamaguchi



 
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