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Title:
RESIN COMPOSITION CURABLE BY CROSSLINKING LAMINATED BODY AND CURING METHOD
Document Type and Number:
Japanese Patent JPH09236916
Kind Code:
A
Abstract:

To enable the roughening of the surface of a resist by acid or alkali solvent treatment after curing.

This resin composition is prepd. by blending 30-60 pts.wt. at least one kind of ethylenic unsatd. compd. having two or more (meth)acryloyloxy groups in one molecule with 30-60 pts.wt. polymer for a binder contg. 15-30wt.% at least one kind of α,β-unsatd. carboxyl group-contg. monomer and 5-30wt.% at least one kind of hydroxyl group-contg. monomer, 10-30 pts.wt. water-soluble polymer for a binder contg. 10-40wt.% hydroxyl group-contg. monomer and 1-20 pts.wt. block polyisocyanate compd., and 100 pts.wt. of the composition is further blended with 0.001-10 pts.wt. photopolymn. initiator to obtain the objective resin compsn. In order to ensure a sufficiently large film thickness on a pattern, the resin compsn. is used in the form of a dry film resist using a substrate film having a roughened surface.


Inventors:
YANAGASE AKIRA
FUJIWARA TADAYUKI
SENDA KAZUMI
NOMI HARUICHI
Application Number:
JP6674296A
Publication Date:
September 09, 1997
Filing Date:
March 22, 1996
Export Citation:
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Assignee:
MITSUBISHI RAYON CO
International Classes:
G03F7/004; C08G18/62; C08G18/67; C08G18/80; C09J175/04; G03F7/027; G03F7/033; (IPC1-7): G03F7/027; C08G18/62; C08G18/67; C08G18/80; C09J175/04; G03F7/004; G03F7/033