Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
RESIN COMPOSITION
Document Type and Number:
Japanese Patent JP2009198962
Kind Code:
A
Abstract:

To provide a resin composition having high sensitivity to light and excelling in patterning property, especially a resin composition suitably usable for formation of a spacer provided joined to the functional surface side of a semiconductor element to determine a gap to be formed on the functional surface side of the semiconductor element or for formation of a protective film, an insulating film, or the like of the semiconductor element.

The resin composition contains a norbornene-based polymer having an epoxy group, and a photosensitizer which is onium salt of specific structure. The norbornene-based polymer is preferably an addition polymer. The content of the photosensitizer is preferably 0.1-10 pts.wt. based on 100 pts.wt. of the norbornene-based polymer. Preferably, the resin composition further contains an acid scavenger.


Inventors:
KUSUKI JUNYA
TAKEUCHI ETSU
Application Number:
JP2008042780A
Publication Date:
September 03, 2009
Filing Date:
February 25, 2008
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SUMITOMO BAKELITE CO
International Classes:
G03F7/038; C08F232/04; G03F7/004
Domestic Patent References:
JP2007224183A2007-09-06
JP2006323227A2006-11-30
JP2007008919A2007-01-18
JP2007224183A2007-09-06