RESIN AND RESIST COMPOSITION - Sumitomo Chemical Co., Ltd.

Title:

RESIN AND RESIST COMPOSITION

Document Type and Number:

Japanese Patent JP2023052409

Kind Code:

A

Abstract:

To provide a resist composition from which a resist pattern having a good shape and good crack resistance can be produced.SOLUTION: A resin contains a structural unit represented by formula (I-2). [Ri45 represents a C3-10 alicyclic hydrocarbon group which may be substituted with a hydroxyl group, or a C2-7 acyl group.]SELECTED DRAWING: None

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Inventors:

Masako Sugihara
Takashi Nishimura

Application Number:

JP2023004345A

Publication Date:

April 11, 2023

Filing Date:

January 16, 2023

Export Citation:

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Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C08F212/14; C08F220/06; C08F220/18; C08F220/26; G03F7/039

Attorney, Agent or Firm:

Patent Attorney Corporation Shinju Global IP

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