Title:
樹脂及びレジスト組成物
Document Type and Number:
Japanese Patent JP7213308
Kind Code:
B2
Abstract:
wherein Ri41 represents a hydrogen atom or a methyl group, Ri42 represents a C1 to C10 hydrocarbon group that may be substituted with a hydroxy group, a C2 to C7 acyl group or a hydrogen atom, Ri43 in each occurrence independently represents a C1 to C6 alkyl group or a C1 to C6 alkoxy group, “p” represents an integer of 0 to 4, Z represents a divalent C3 to C20 hydrocarbon group having a group represented by formula (Ia), and a methylene group contained in the hydrocarbon group may be replaced by an oxygen atom, a sulfur atom or a carbonyl group, *—[(CH2)w—O]r— (Ia): wherein “w” and “r” each independently represents an integer of 1 to 10, and * represent a bonding position.
Inventors:
Masako Sugihara
Takashi Nishimura
Takashi Nishimura
Application Number:
JP2021112217A
Publication Date:
January 26, 2023
Filing Date:
July 06, 2021
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C08F12/22; G03F7/039
Domestic Patent References:
| JP10087724A | ||||
| JP10306120A | ||||
| JP11282163A | ||||
| JP2011013581A | ||||
| JP9319092A | ||||
| JP6910108B2 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
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